Mega Fluid Systems– New MegaSafe Control Software Adds Fail-Safe Feature to Chemical and Slurry Dispense Tools

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Mega Fluid Systems– New MegaSafe Control Software Adds Fail-Safe Feature to Chemical and Slurry Dispense Tools

TUALATIN, OR — (Marketwired) — 11/01/17 — Mega Fluid Systems, Inc., a global supplier of chemical and slurry delivery equipment to the semiconductor, LED, pharmaceutical, specialty chemicals and solar/PV industries, today announced the availability of its new MegaSafe control software designed to maintain global loop dispense to point-of-use chemical mechanical planarization (CMP) and cleaning tools in the event of a programmable logic controller (PLC) failure. By keeping track of tool statu

Mega Fluid Systems Brings Cost-effective Slurry Blend and Delivery to IoT Device Manufacturing

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Mega Fluid Systems Brings Cost-effective Slurry Blend and Delivery to IoT Device Manufacturing

TUALATIN, OR — (Marketwired) — 05/09/17 — Leveraging nearly 30 years of expertise in slurry management for the semiconductor, LED, solar and related markets, Mega Fluid Systems Inc. today introduced the Essex line of slurry and chemical blend and distribution systems. Essex offers the first high-quality, cost-effective system to meet the slurry and chemistry delivery needs of low-volume, legacy-node and specialty technologies. Originally developed for advanced CMP processes, Mega Fluid Syste