MV Multi-Trap(R) Vacuum Pump Inlet Trap Stacks for 300 mm Wafer Fabrication Processes
NORTH BILLERICA, MA — (Marketwire) — 03/19/13 — has announced that their high-capacity, modular vacuum pump inlet-exhaust traps can be stacked for semiconductor wafer fabrication processes which produce a lot of heavy particulates.The is a robust that can be stacked for 300 mm semiconductor wafer fabricators utilizing LPCVD, PECVD, and ALD processing. Featuring all stainless steel construction with a first stage knock-down baffle, two stacked traps can accumulate up to 2,500 cu. in. of so