CNR-IMM Italy uses SI PEALD LL for new high-k materials

CNR-IMM Italy uses SI PEALD LL for new high-k materials

The Institute for Microelectronics and Microsystems (CNR-IMM/1/) in Catania, Italy is using a SI PEALD LL tool with an 8-inch wafer configuration. The research Institute belongs to the Physics and Matter Technologies Department (DSFTM) of the National Reseach Council of Italy (CNR), and has its headquarters in Catania. The integration of novel high-k gate dielectrics and passivating layers on devices based on Gallium Nitride and other wide band gap semiconductors is investigated using SENTECH PE

New Spectroscopic Ellipsometer SENresearch 4.0 launched!

New Spectroscopic Ellipsometer SENresearch 4.0 launched!

SENTECH proudly presents the new spectroscopic ellipsometer SENresearch 4.0.
The SENresearch 4.0 is an innovative ellipsometry solution which features widest spectral ranges and highest spectral resolution. The Step Scan Analyser (SSA) principle is applied for ellipsometric measurement, i.e. there are no moving optical parts during data acquisition for best measurement results.