Dr. Gargouri, SENTECH specialist for ALD processes, gave a speech during the conference. “Using the ALD Real Time Monitor enables efficient and fast process optimization” Dr Gargouri points out. “With this new tool SENTECH has shown that we have an outstanding Know How in fields of metrology equipment & ALD “.
The 3rd China ALD Conference hold from 16-17 of October 2014 in Shanghai was the ideal event to interchange with the Asian ALD society. It was especially attended by experts from the Asian region. Numerous talks between SENTECH representatives and participants of the conference showed the broad interest in SENTECH ALD equipment and especially in the new Real Time Monitor.
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