The ALD Real Time Monitor is an insitu measurement tool for adsorption and desorption processes during ALD cycles with millisecond time resolution. The innovative ALD Real Time Monitor is especially designed for fast and efficient process optimization. Additionally, monitoring the film thickness growth the tool is used for end point detection.
The presentation of SENTECH ALD Real Time Monitor drew attention to the newly launched insitu measurement tool and contributed to a successful SEMICON Europa 2014. We are looking forward to the upcoming SEMICON Europa 2015 taking place in Dresden, Germany.
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