FREMONT, CA — (Marketwired) — 04/24/13 — A major Texas semiconductor manufacturer has purchased from MicroTech an ORCA Fully Automated Intelligent Process System (IPS) because of its ability to process wafers in a high throughput environment.
The wafer process system was specifically designed for a high throughput metal “lift off” application. Because of the custom designed process configuration, initial throughput data indicates a six fold increase in wafer throughput and increased ROI.
The 200mm fully automated ORCA IPS includes:
MicroTech 5500 multi-tasking, GUI-based, touch screen, recipe controlled software
MicroTech 5000 two axis linear transfer robot
Ultrasonic process for continuous, high energy cleaning
Temperature controlled recirculation of chemicals for reduced chemical usage
Modular design for flexibility and ease of modification
Bulk chemical supply interface
The automated wafer process system was delivered and installed and is currently going through final start-up qualification.
MicroTech is a leader in the engineering, manufacturing and applications support of wet process and chemical distribution equipment as well as on-site service, repair and maintenance. The company-s 20,000 square foot Silicon Valley manufacturing facility is equipped with a Class 100 clean room fully facilitated with DI water and nitrogen for pre-shipment final testing. With over 25 years- experience as a semiconductor equipment manufacturer, MicroTech also supplies the Solar, MEMS, LED, BioMed and flat panel display (FPD) markets.
Company Contact:
Craig Story
V.P. Sales and Marketing
510.651.5277 ext. 213
Agency Contact:
Bruce Kirkpatrick
925.244.9100
You must be logged in to post a comment Login